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Home > Clean room > Clean Room Specification
 


 

 

Outline of Fed. Std. 209E

The highest value of a class is the name of the class.

The highest value is expressed with a concentration more than specified
(Number of Particles per Unit Volume).

Item
Description
Unit
 Primarily the metric system is used and UK units are used in combination.
Class Expression
 The number of particles of 0.5§­ or larger is defined with 10/§© and X is used for the mark of class. ¡®M¡¯ is added to clearly represent the mark of the metric system.
Class Classification
 Class M1 with higher level of cleanliness than that of 209D Class 1 and Class M7 with lower level of cleanliness than that of Class 100,000 were added.
Particle Instrumentation
 CNC can be used in instrumentation and the diameter of a particle instrumented can be 0.02§­ or larger. In that case, Class U(X) is marked.
U = Mark of Particle Instrumentation
X = Maximum Particle Concentration (P/§©)
Standard Measurement Particle
 It can be 0.1, 0.2, 0.3, 0.5 or 5 micron but other diameters may be used.
Sampling
 Other sampling flows may be used in instrumentation depending on the location of instrumentation but the particle concentration must be expressed as ¡®number/unit volume.¡¯
If the number of sampling points is 10 or more, then a simple average may be used. If the level of cleanliness is higher than Class M2.5, a continuous sampling may be allowed for reducing the instrumentation time.
Annex
 Standards and terms related to 209D are deleted but the uniform velocity suctioning, super-fine particle concentration measurement and continuous sampling, for higher level of cleanliness than Class M2.5, are added.

 
 
Class Mark
Class Highest Value
0.1§­
0.2§­
0.3§­
0.5§­
5§­
Unit Volume
Unit Volume
Unit Volume
Unit Volume
Unit Volume
Meter
System
UK Unit
(§©)
(ft©ø)
(§©)
(ft©ø)
(§©)
(ft©ø)
(§©)
(ft©ø)
(§©)
(ft©ø)
M1
-
350
9.91
75.7
2.14
30.9
0.875
10.0
0.283
-
-
M1.5
1
1,240
35.0
265
7.50
106
3.00
35.3
1.00
-
-
M2
-
3,500
99.1
757
21.4
309
8.75
100
2.83
-
-
M2.5
10
12,400
350
2,650
75.0
1,060
30.0
353
10.0
-
-
M3
-
35,000
991
7,570
214
3,090
87.5
1,000
28.3
-
-
M3.5
100
-
-
26,500
750
10,600
300
3,530
100
-
-
M4
-
-
-
75,700
2,140
30,900
875
10,000
283
-
-
M4.5
1,000
-
-
-
-
-
-
35,300
1,000
247
7.00
M5
-
-
-
-
-
-
-
100,000
2,830
618
17.5
M5.5
10,000
-
-
-
-
-
-
353,000
10,000
2,470
70.0
M6
-
-
-
-
-
-
-
1,000,000
28,300
6,180
175
M6.5
100,000
-
-
-
-
-
-
3,530,000
100,000
24,700
700
M7
-
-
-
-
-
-
-
10,000,000
283,000
61,800
1,750


  These represent the general rule about the selection of the air current velocity in a clean room.
The air current velocity is specified as (1) average velocity (m/s or ft/m) or (2) the number of ventilation per hour (number / hour).


Class Air Current Type Average Air Current Velocity 1 Ventilations per Hour 2
M7&M6.5(Class 100,000)
NM
.005- .041m/sec (1-8ft/min)
5 - 48
M6&M5.5(Class 10,000)
NM
.051- .076m/sec (10-15ft/min)
60 - 90
M5&M4.5(Class 1,000)
NM
.127- .203m/sec (20-40ft/min)
150 - 240
M4&M3.5(Class 100)
UNM
.203- .406m/sec (40-80ft/min)
240 - 480
M3&M2.5(Class 10)
U
.254- .457m/sec (50-90ft/min)
300 - 540
M2&M1.5(Class 1)
U
.305- .457m/sec (60-90ft/min)
360 - 540
M1 Cleaner
U
.305- .508m/sec (60-100ft/min)
360 - 600

(U=Unitary Direction, N=Non-Single Direction, M=Mixed)
1. The average velocity is generally used for unitary direction.
2. The number of ventilation per hour can be determined by the following expression:

Ventilations per Hour [number/hr] =
Average Air Current Velocity (m/sec)¡¿Shot Area (m2)¡¿3,600sec
Indoor Volume (m3)


 

 
 
Item Description
Entry&Exit
  • Minimize and separately consider Entry and Exit. (Especially for the installation of air shower)
  • Do not expose them directly to the air (Air Lock Room)
  • Locate them downstream (Especially, Cross Floor).
Locker Room
  • Take as much as air for the locker room.
  • Install a washstand and prepare drinks if many peoples gather.
  • Install at least the double door between clean rooms.
    (Install Air Shower Systems)
  • Enable internal communications.
  • Establish a rest room, if necessary.
Take In & Out
  • Use a pass box if applicable (parts).
  • Attach a take-in hole. (Large Systems)
Indoor Arrangement
  • Simplify.
  • Install the control office outdoor. Consider how to contact.
  • Plan to expand.
  • Minimize the movement.
  • Consider the direction of fresh air current to arrange workplace.
  • In works causing oscillation, use partitions, local exhaust and return duct.
Indoor Facilities
  • Minimize the exposure of wire and duct.
  • Install the light system over the ceiling if applicable.
  • Prepare for emergency, fire, blackout or poisonous gas.
  • Install an inter-phone or telephone.
  • Clean.
  • Record particles concentration, temperature and humidity.